@article{IUPAC+S05895+2019,
url = {https://doi.org/10.1351/goldbook.S05895},
institution = {International Union of Pure and Applied Chemistry (IUPAC)},
year = {2019},
title = {sputtering},
doi = {doi:10.1351/goldbook.S05895},
edition = {3.0.1}
}