electron probe microanalysis

https://doi.org/10.1351/goldbook.E02006
General term for methods using bombardment of a solid specimen by electrons which generate a variety of signals providing the basis for a number of different analytical techniques.
Source:
PAC, 1983, 55, 2023. (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2024 [Terms] [Paper]