electron probe X-ray microanalysis

https://doi.org/10.1351/goldbook.E02007
Any analytical technique which uses the excitation and evaluation of the characteristic X-ray spectrum of a solid specimen by a focused electron beam (typically of a diameter of less than \(1\ \unicode[Times]{x3BC}\text{m}\)). Qualitative and quantitative X-ray analysis is the main feature of EPXMA. For obtaining supplementary information the @S05518@, @B00583@ and @A00033@ are also frequently observed. Qualitative and quantitative X-ray analysis is, however, the main feature of EPXMA.
Source:
PAC, 1983, 55, 2023. (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2024 [Terms] [Paper]