ion microscopy

https://doi.org/10.1351/goldbook.I03221
Use of the secondary ion @M03746@ (SIMS) technique to obtain micrographs of the elemental (or isotopic) distribution at the surface of a sample with a spatial resolution of \(2\ \unicode[Times]{x3BC}\text{m}\) or better.
Source:
Orange Book, 2nd ed., p. 249 [Terms]