ion probe microanalysis

https://doi.org/10.1351/goldbook.I03238
Any technique in which the specimen is bombarded by a focused beam of (primary) ions (diameter less than \(10\ \unicode[Times]{x3BC}\text{m}\)) and the (secondary) ions ejected from the specimen are detected after passage through a @M03732@.
Sources:
PAC, 1979, 51, 2243. (General Aspects of Trace Analytical Methods—IV. Recommendations for Nomenclature, Standard Procedures and Reporting of Experimental Data for Surface Analysis Techniques) on page 2246 [Terms] [Paper]
PAC, 1983, 55, 2023. (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2025 [Terms] [Paper]