reflection high energy electron diffraction

https://doi.org/10.1351/goldbook.R05238
Any technique which measures the angular intensity distribution of electrons 'reflected' from a crystalline surface under bombardment with high energy electrons near grazing incidence. The @D01711@ pattern provides very surface sensitive information (information depth \(1\ \text{nm}\)) on the atomic arrangement of the top layers of a solid.
Source:
PAC, 1983, 55, 2023. (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2025 [Terms] [Paper]