## Rutherford backscattering (RBS)

Synonym: backscattering spectroscopy
https://doi.org/10.1351/goldbook.R05429
Any technique using high energy particles directed toward a sample, in which the bombarding particles are detected and recorded as function of energy and/or @A00346@. The technique is mostly used for determining depth distributions of elements based on the energy of the backscattered particle. In general, He+ or H+ particles are used at energies in the order of $$100\ \text{keV}$$ to some $$\mathrm{MeV}$$. Also referred to as backscattering @S05848@ (BSS).
Source:
PAC, 1979, 51, 2243. (General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques) on page 2246 [Terms] [Paper]