sputter yield

https://doi.org/10.1351/goldbook.S05896
The number of particles sputtered from the surface of a target per primary ion.
Source:
PAC, 1979, 51, 2243. 'General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2247 (https://doi.org/10.1351/pac197951112243)