Process by which the sample is sputtered 'atomic layer by layer' using suitable conditions.
Notes: - Depth profile analysis can be accomplished by time resolved measurement of the generated emission signals.
- Depth profiling using signal versus time measurement requires knowledge of the ablation rate, which must be known, or has to be calculated, from measurements of suitable materials.
Source:
PAC, 2021, 93, 647. 'Glossary of methods and terms used in analytical spectroscopy (IUPAC Recommendations 2019)' on page 715 (https://doi.org/10.1515/pac-2019-0203)