Measurement method of X-ray fluorescence to obtain quantitative and spatial information about elements in a sample.
Notes: - X-ray beam energies of \(\pu{5 keV}\) excite core level vacancies and promote hard X-ray emission, for which the fluorescence yield is high.
- Spatial resolution is typically in the range from \(\pu{200 nm}\) to \(\pu{10 \upmu\!m}\), but, using specialised probes at synchrotron facilities, the lower limit can be decreased to tens of nanometers.
Source:
PAC, 2021, 93, 69. 'Vocabulary of radioanalytical methods (IUPAC Recommendations 2020)' on page 107 (https://doi.org/10.1515/pac-2019-0302)