Term: excimer laser https://doi.org/10.1351/goldbook.E02243 Definition: A source of pulsed coherent radiation obtained from an exciplex. The proper name is exciplex laser. Typical lasing species are noble gas halides (XeCl, KrF, etc.) emitting in the UV domain. Related Terms: 1) coherent radiation (http://doi.org/10.1351/goldbook.C01130). 2) exciplex (http://doi.org/10.1351/goldbook.E02246). 3) laser (http://doi.org/10.1351/goldbook.L03459). 4) lasing (http://doi.org/10.1351/goldbook.L03479). 5) gas lasers (http://doi.org/10.1351/goldbook.G02585). Source: PAC, 1995, 67, 1913. 'Nomenclature, symbols, units, and their usage in spectrochemical analysis-XV. Laser-based molecular spectroscopy for chemical analysis - laser fundamentals (IUPAC Recommendations 1995)' on page 1920 (https://doi.org/10.1351/pac199567111913) Citation: 'excimer laser' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.E02243 License: The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms. Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.