Measurement principle in which characteristic X-radiation, produced upon irradiation of a material with elementary particles or photons, is applied to measure amounts of elements in a material.
Source:
PAC, 2021, 93, 69. 'Vocabulary of radioanalytical methods (IUPAC Recommendations 2020)' on page 106 (https://doi.org/10.1515/pac-2019-0302)