low energy electron diffraction

Any technique which measures the angular intensity distribution of electrons reflected from a crystalline surface under bombardment with low energy electrons (\(E_{0} < 500\ \text{eV}\)) in larger angles of incidence. The @D01711@ pattern also provides very surface sensitive information on the atomic arrangement of the top layers of a solid.
PAC, 1983, 55, 2023. (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2025 [Terms] [Paper]