sputter rate

unit: μgs−1
https://doi.org/10.1351/goldbook.08552
Mass of material removed from a sample surface in unit time.
Note: Si unit kgs−1. Common unit μgs−1.
Source:
PAC, 2021, 93, 647. (Glossary of methods and terms used in analytical spectroscopy (IUPAC Recommendations 2019)) on page 734 [Terms] [Paper]
Citation: 'sputter rate' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.08552 RIS BibTex EndNote
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