IUPAC - sputter rate (08552)

sputter rate unit: $μ g s^{- 1}$

https://doi.org/10.1351/goldbook.08552

Mass of material removed from a sample surface in unit time.

Note:
Si unit

kg s^{- 1}

. Common unit

μ g s^{- 1}

Source:
PAC, 2021, 93, 647. (Glossary of methods and terms used in analytical spectroscopy (IUPAC Recommendations 2019)) on page 734 [Terms] [Paper]

Citation: 'sputter rate' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.08552 RIS BibTex EndNote

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Version 3.0.1 (7233 Terms)

sputter rate unit: $μ g s^{- 1}$

Alphabetical Index

Additional Indexes

Version 3.0.1 (7233 Terms)

sputter rate unit: μμgs−1

sputter rate unit: $μ g s^{- 1}$