https://doi.org/10.1351/goldbook.09193
Method of secondary-ion mass spectrometry using low current densities for analysis of sample surface components, in contrast with dynamic secondary-ion mass spectrometry, which is used for analysis of components in the depth direction.
Notes:
- When the sample is an organic molecule in solid form, the term is often changed to organic SIMS or molecular SIMS.
- The ion areic dose during measurement is restricted to less than
ions per to an extent that depends on both the material of the sample and the size of the molecular fragments being analysed. - Ions are usually detected by a time of flight mass spectrometer (TOF-SIMS).