X-ray reflectometry

initialism: XRR
https://doi.org/10.1351/goldbook.09214
Measurement method for surface and interface roughness and density, layer thickness of thin layers, and electron density profile achieved by reflecting X-rays from a flat sample and analysing the reflected intensity as a function of angle.
Note: Monochromatic X-rays of low divergence are required. Many layers can be modelled, with thicknesses between about 1 nm and a few μm, and (subject to conditions) fitted to the data. The surface needs to be flat over the beam footprint of typically 10 mm to 40 mm.
See also: specular X-ray reflectometry
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1795 [Terms] [Paper]
Citation: 'X-ray reflectometry' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09214 RIS BibTex EndNote
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