backscattered electron

https://doi.org/10.1351/goldbook.09311
Electron, originating in the incident beam, which is emitted after interaction with the sample.
Notes:
  1. By convention, an electron with energy greater than 50 eV can be considered a backscattered electron.
  2. By convention, the incident beam is often called the primary beam and the backscattered electrons are often referred to as the backscattered primary electrons.
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1821 [Terms] [Paper]
Citation: 'backscattered electron' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09311 RIS BibTex EndNote
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