https://doi.org/10.1351/goldbook.09429
Ion fluence above which any significant changes in the spectrum, arising from beam damage, are observed in secondary ion mass spectrometry.
Notes:
- Classically, a limit of
ions per , or ions per is taken as the limit not to be exceeded in static secondary ion mass spectrometry. This limit is based on one incident ion for each surface atoms. - For imaging, the total molecular signal can be used, and here the limit can be greater and reach
times the limit given in Note 1. - For large molecules, the damage cross section and disappearance cross section are both generally larger than for small molecules, leading to a static limit less than
ions per .