ultra-shallow depth profile

https://doi.org/10.1351/goldbook.09432

Depth profile in secondary-ion mass spectrometry where the depth over which significant changes occur is less than 10 nm.

Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1846 [Terms] [Paper]
Citation: 'ultra-shallow depth profile' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09432 RIS BibTex EndNote
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