magnetic mask

https://doi.org/10.1351/goldbook.09524

Mask with a pattern defined by a paramagnetic metal.

Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1879 [Terms] [Paper]
Citation: 'magnetic mask' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09524 RIS BibTex EndNote
Div. IVTextXMLJSON