depth profile
Dependence of concentration on depth perpendicular to the surface in a solid sample. It can be obtained by a simultaneous or sequential process of erosion and surface analysis or by measurement of the energy loss of primary backscattered particles produced by nuclear reactions.
PAC, 1979, 51, 2243. (General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques) on page 2247 [Terms] [Paper]