Any technique which utilizes the @D01711@ of X-rays generated in a microstructural domain of a solid under bombardment with a finely focused electron beam, thus providing an X-ray @D01711@ pattern of this microstructural domain. The pattern can be recorded with a @F02366@ either on the reflection or @T06477@ side of the specimen (in the latter case the crystalline sample has to be a @T06345@ or a small particle).