https://doi.org/10.1351/goldbook.R05429
Any technique using high energy particles directed toward a sample, in which the bombarding particles are detected and recorded as function of energy and/or to some . Also referred to as backscattering
angle
. The technique is mostly used for determining depth distributions of elements based on the energy of the backscattered particle. In general, He+ or H+ particles are used at energies in the order of spectrometry
(BSS).