scanning electron microscopy (SEM) 

https://doi.org/10.1351/goldbook.S05484
Any analytical technique which involves the generation and evaluation of secondary electrons (and to a lesser extent back scattered electrons) by a finely focused electron beam (typically 10 nm or less) for high resolution and high depth of field imaging.
Source:
PAC, 1983, 55, 2023. (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2024 [Terms] [Paper]
Citation: 'scanning electron microscopy' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.S05484 RIS BibTex EndNote
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Last revised: February 24, 2014