depth-profiling

https://doi.org/10.1351/goldbook.08464
Process by which the sample is sputtered 'atomic layer by layer' using suitable conditions.
Notes:
  1. Depth profile analysis can be accomplished by time resolved measurement of the generated emission signals.
  2. Depth profiling using signal versus time measurement requires knowledge of the ablation rate, which must be known, or has to be calculated, from measurements of suitable materials.
Source:
PAC, 2021, 93, 647. (Glossary of methods and terms used in analytical spectroscopy (IUPAC Recommendations 2019)) on page 715 [Terms] [Paper]
Citation: 'depth-profiling' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.08464 RIS BibTex EndNote
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