ionization by sputtering 

https://doi.org/10.1351/goldbook.I03189
Ionization by bombardment of a solid specimen with accelerated ions or electrons or fast neutrals.
Source:
Orange Book, 2nd ed., p. 204 [Terms] [Book]
Citation: 'ionization by sputtering' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.I03189 RIS BibTex EndNote
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Last revised: February 24, 2014