https://doi.org/10.1351/goldbook.D01673
Diamond
-like carbon (DLC) films are hard, amorphous films with a significant fraction of sp3-hybridized carbon atoms and which can contain a significant amount of hydrogen. Depending on the deposition conditions, these films can be fully amorphous or contain
diamond
crystallites. These materials are not called
diamond
unless a full three-dimensional crystalline lattice of
diamond
is proven.
Note:
Diamond
-like films without hydrogen can be prepared by carbon ion beam deposition, ion-assisted
sputtering
from
graphite
or by
laser
ablation of
graphite
.
Diamond
-like carbon films containing significant contents of hydrogen are prepared by chemical vapour deposition. The hydrogen content is usually over 25 atomic %. The deposition parameters are (low) total pressure, hydrogen
partial pressure
, precursor molecules and plasma
ionization
. The plasma
activation
can be radio frequency, microwave or Ar+ ions. High
ionization
favours amorphous films while high atomic hydrogen contents favour
diamond
crystallite formation. Because of the confusion about structure engendered by the term
diamond
-like carbon films, the term
hard amorphous carbon
films has been suggested as a synonym.
Source:
PAC, 1995, 67, 473. (Recommended terminology for the description of carbon as a solid (IUPAC Recommendations 1995)) on page 487 [Terms] [Paper]