https://doi.org/10.1351/goldbook.D01673
Diamond
-like carbon (DLC) films are hard, amorphous films with a significant fraction of diamond
crystallites. These materials are not called diamond
unless a full three-dimensional crystalline lattice of diamond
is proven.Note:
Diamond
-like films without hydrogen can be prepared by carbon ion beam deposition, ion-assisted sputtering
from graphite
or by laser
ablation of graphite
. Diamond
-like carbon films containing significant contents of hydrogen are prepared by chemical vapour deposition. The hydrogen content is usually over 25 atomic %. The deposition parameters are (low) total pressure, hydrogen partial pressure
, precursor molecules and plasma ionization
. The plasma activation
can be radio frequency, microwave or Ar+ ions. High ionization
favours amorphous films while high atomic hydrogen contents favour diamond
crystallite formation. Because of the confusion about structure engendered by the term diamond
-like carbon films, the term hard amorphous carbon
films has been suggested as a synonym.